Prime Wafer Polishing Slurries

Nalco Water has supplied colloidal silica to the wafer industry for decades, and our comprehensive and wide-ranging expertise allow us to produce some of the highest quality silicon polishing slurries in the industry.

Our highly stable colloidal silica products offer exceptional purity, controlled particle size, distribution, and morphology for optimum performance in your prime wafer polishing processes.

Excellent surface finish and planarity

Low defectivity

 

Steady performance

 

High removal rates

 

References

  1. Products were made using LMSII engineered approach to remove metals; [Cu] and [Ni] less than 20 ppb. Availability subject to the volume.

Innovating for the Needs of CMP Slurry Formulators

Nalco Water has aligned our colloidal silica manufacturing capabilities to deliver high-purity, innovative nanoparticles to meet the needs of the CMP slurry formulator.

  • Ultra-high purity waterglass-based nanoparticles
  • Broad range of particle sizes, size distributions, and concentrations
  • Engineered products designed to be stable across a broad pH range
  • Strong research-to-research collaboration

Addressing Multiple Polishing Applications

Our colloidal silica-based polishing slurries are widely used for the stock polish, edge polish and final polish steps in the manufacture of silicon wafers and other semiconductor substrates for microchips.

These slurries are also used in the precision surface finishing of optics, watch crystals and other glass components.

Get in Touch with Us

Give Us a Call

With unparalleled expertise and cutting-edge technology, we partner with customers to deliver world-class results and optimized operations. Contact us to learn how we can help you.

Ecolab Inc.
1 Ecolab Place
St. Paul, MN 55102

Ecolab Customer Service: 
Phone: +1-800-352-5326

Nalco Water Customer Service
Phone: +1-800-288-0879

Give Us a Call

With unparalleled expertise and cutting-edge technology, we partner with customers to deliver world-class results and optimized operations. Contact us to learn how we can help you.

Ecolab Inc.
1 Ecolab Place
St. Paul, MN 55102

Ecolab Customer Service
Phone: +1-800-352-5326

Nalco Water Customer Service
Phone: +1-800-288-0879

Contact Us

Contact Us

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